TRANSPORT METHOD AND TRANSPORT APPARATUS

专利名称：TRANSPORT METHOD AND TRANSPORT

APPARATUS

发明人：Hidehiro MAEDA,Kazuya Okamoto,Yasuaki

Tanaka

申请号：US12644615申请日：20091222

公开号：US20100168908A1公开日：20100701

专利附图：

摘要：Provided is a transport method comprising judging whether there is a possibilitythat misalignment greater than or equal to a threshold value occurs between substrates

to be layered that are held by a pair of substrate holders aligned and stacked by analigning section, the misalignment occurring when the pair of substrate holders istransported from the aligning section to a pressure applying section; and if the judgmentindicates that there is the possibility of misalignment, transporting the pair of substrateholders to a region other than the pressure applying section. Whether there is thepossibility of misalignment may be judged based on acceleration of the substrateholders. Whether there is the possibility of misalignment may be judged based onacceleration of a transporting section that transports the substrate holders. Whetherthere is the possibility of misalignment may be judged based on relative positions of thesubstrate holders. Whether there is the possibility of misalignment may be judged basedon relative positions of (i) a transporting section that transports the pair of substrateholders and (ii) one of the pair of substrate holders.

申请人：Hidehiro MAEDA,Kazuya Okamoto,Yasuaki Tanaka

地址：Tokyo JP,Tokyo JP,Tokyo JP

国籍：JP,JP,JP

更多信息请下载全文后查看