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SEMICONDUCTOR DEVICE HAVING BURIED GATE, METHOD OF

2023-05-02 来源:爱问旅游网
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专利名称:SEMICONDUCTOR DEVICE HAVING BURIED

GATE, METHOD OF FABRICATING THESAME, AND MODULE AND SYSTEM HAVINGTHE SAME

发明人:Tae Kyung OH,Min Soo YOO申请号:US13719002申请日:20121218

公开号:US20140063934A1公开日:20140306

专利附图:

摘要:A semiconductor device includes junction regions formed in upper portions of

both sidewalls of a trench formed in a semiconductor substrate, a first gate electrodeburied in the trench and having a stepped upper surface, and a second gate electrodeformed on the first gate electrode to overlap a junction region.

申请人:SK HYNIX INC.

地址:Icheon KR

国籍:KR

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