专利名称:SEMICONDUCTOR DEVICE HAVING BURIED
GATE, METHOD OF FABRICATING THESAME, AND MODULE AND SYSTEM HAVINGTHE SAME
发明人:Tae Kyung OH,Min Soo YOO申请号:US13719002申请日:20121218
公开号:US20140063934A1公开日:20140306
专利附图:
摘要:A semiconductor device includes junction regions formed in upper portions of
both sidewalls of a trench formed in a semiconductor substrate, a first gate electrodeburied in the trench and having a stepped upper surface, and a second gate electrodeformed on the first gate electrode to overlap a junction region.
申请人:SK HYNIX INC.
地址:Icheon KR
国籍:KR
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