专利名称:Micro-electrical-mechanical device and
method of making same
发明人:Robert C. Allison,Ron K. Nakahira,Joon
Park,Brian H. Tran
申请号:US11031950申请日:20050110公开号:US07098576B2公开日:20060829
专利附图:
摘要:A micro-electro-mechanical device including a first substrate; a first contactdisposed on a first surface of the substrate; a piezoelectric actuator disposed over the
first surface of the substrate; a second contact coupled to the actuator and disposed inproximity to the first contact; a gap control mechanism disposed between the substrateand the actuator for limiting movement of the first contact relative to the secondcontact. In the exemplary embodiment, the gap control mechanism is a gap control stopconstructed of dielectric material. In practice, plural stops are used. In the exemplaryembodiment, plural thermosonic bonds are used to connect the actuator to the firstsubstrate. A second substrate is disposed over the piezo-electric actuator. The secondsubstrate has wells over the bonds to facilitate application of a bonding tool to thebonds. The gap control mechanism provides consistent height control between a flippedchip and its base substrate without exposing the assembly to high temperatures.
申请人:Robert C. Allison,Ron K. Nakahira,Joon Park,Brian H. Tran
地址:Rancho Palos Verdes CA US,Fullerton CA US,Gardena CA US,Rosemead CA US
国籍:US,US,US,US
代理人:Leonard A. Alkov, Esq.,John E. Gunther,Karl A. Vick
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