Plurality of beam producing means disposed in diff

专利名称：Plurality of beam producing means disposed

in different longitudinal and lateral

directions from each other with respect to asubstrate

发明人：Kenji Ando,Osamu Kamiya,Masao

Sugata,Noriko Kurihara,Hiroyuki

Sugata,Tohru Den,Toshiaki Kimura,TakashiHamamoto,Masahiro Haruta,Kuniji Osabe

申请号：US07/453240申请日：19891218公开号：US04957061A公开日：19900918

摘要：A device for blowing fine particles is provided which comprises a plural numberof upstream chambers for jetting out fine particles provided against a movable substrate.Each of the upstream chambers may be provided with a gas exciter, and also may beprovided with an energy imparter for imparting energy to the substrate.

申请人：CANON KABUSHIKI KAISHA

代理机构：Fitzpatrick, Cella, Harper & Scinto

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