气体流量计算表

Bulk Gas 一般流速为10m/s (压力7.5kg/cm2); Ar、He < 10~15m/s; SiH4、PH3<5m/s; CO2、NH3<1~5m/sSpecial Gas : NH3、N2O、HCL、BCL3、HF、HBr、SF6等液态气体，流速应小于1m/s

一般气态钢瓶10m/s，液态钢瓶则蒸汽压愈低，流速要愈慢，否则管件上将生结露现象，影响Regulator的准确性LPMm3/hrkg/cm2t Tube1/4\"3/8\"1/2\"3/4\"1\"1 1/4\"1 1/2\"1 3/4\"2\"2 1/2\"3\"3 1/2\"4\"4 1/2\"100A125A150A200AFlow(Q)Flow(Q)Pressure(P)Temperature(T)O.DT (mm)(mm)6.359.5312.719.125.431.7538.144.4550.863.576.288.9101.6114.3114.3139.8165.2216.30.8890.8891.241.651.651.651.651.651.652.12.12.12.12.12.12.82.82.8I.D(mm)4.5727.75210.2215.822.128.4534.841.1547.559.37284.797.4110.1110.1134.2159.6210.7LPM(l/min)m3/hrkg/cm2°A(m2)0.00001641736071360.00004719743804160.000082033773360.0001960670.0003835970.0006357050.0009511510.0013299350.0017720590.0027618510.0040715140.005634530.0074509010.0095206270.0095206270.0141447710.0200058340.03486743273.04.4725LV(m/s)10.403.622.080.870.450.270.180.130.100.060.040.030.020.020.020.010.010.00209.812.6725LV(m/s)29.9010.405.982.501.280.770.520.370.280.180.120.090.070.050.050.030.020.01364.721.9725LV(m/s)51.9718.0810.404.352.221.340.900.640.480.310.210.150.110.090.090.060.040.02871.652.3725LV(m/s)124.2043.2024.8610.405.323.212.141.531.150.740.500.360.270.210.210.140.100.061705.2102.37252825.9169.67254228.2253.77255912.1354.77257877.5472.672512277.5736.672518099.41086.072525047.61502.972533122.11987.372542322.82539.472542322.82539.472562878.83772.772588933.45336.0725LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)243.0084.5348.6320.3510.406.284.193.002.251.440.980.710.540.420.420.280.200.11402.70140.0880.5933.7217.2410.406.954.973.732.391.621.170.890.690.690.470.330.19602.53209.59120.5850.4525.7915.5610.407.445.583.582.431.761.331.041.040.700.490.28842.48293.05168.6170.5436.0621.7614.5410.407.815.013.402.451.861.451.450.980.690.401122.56390.47224.6694.0048.0428.9919.3813.8610.406.674.533.272.471.941.941.300.920.531749.57608.58350.14146.5074.8845.1830.2021.6016.2110.407.055.103.863.023.022.031.440.822579.21897.16516.17215.97110.3966.6144.5231.8423.9015.3310.407.525.684.454.452.992.121.213569.341241.57714.33298.87152.7692.1861.6144.0633.0721.2214.3910.407.866.156.154.142.931.684719.971641.81944.60395.22202.01121.9081.4758.2743.7328.0619.0313.7510.408.148.145.483.872.226031.092097.881207.00505.00258.12155.76104.1074.4555.8835.8524.3217.5713.2910.4010.407.004.952.846031.092097.881207.00505.00258.12155.76104.1074.4555.8835.8524.3217.5713.2910.4010.407.004.952.848960.373116.811793.23750.28383.49231.41154.66110.6183.0153.2636.1326.1119.7415.4515.4510.407.354.2212673.214408.302536.281061.17542.39327.29218.75156.44117.4175.3351.1036.9327.9221.8521.8514.7110.405.97Q(m3/hr)1.033273+TLV(m/s)=**3600*A(m2)P(atm)+1.033273LPMm3/hrkg/cm2t Tube1/4\"3/8\"1/2\"3/4\"1\"15A20AFlow(Q)Flow(Q)Pressure(P)Temperature(T)O.DT (mm)(mm)6.359.5312.719.125.421.727.21111.651.651.651.65I.D(mm)4.357.5310.715.822.118.423.9LPM(l/min)m3/hrkg/cm2°A(m2)1.49E-054.45E-058.99E-051.96E-043.84E-042.66E-044.49E-0449.63.0525LV(m/s)10.403.831.900.870.450.640.38148.78.9525LV(m/s)33.0310.405.462.501.281.851.09300.218.0525LV(m/s)57.4119.1610.404.352.223.211.90654.639.3525LV(m/s)137.2045.7922.6810.405.327.674.551280.776.8525887.753.35251497.889.95252471.3148.3525Note: 1kg/cm2 ≈ 1atm

4070.5244.25255380.9322.95258579.2514.852513630.9817.952518900.41134.052524875.61492.552531785.51907.152547223.72833.452566791.44007.5525LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)LV (m/s)268.4489.5844.3720.3510.4015.008.89444.86148.4673.5233.7217.2410.4014.74665.60222.13110.0150.4525.7937.2010.40930.67310.59153.8270.5436.0652.0230.831240.06413.84204.9594.0048.0469.3141.081932.70644.99319.43146.5074.88108.0264.022849.18950.84470.90215.97110.39159.2494.383942.951315.86651.68298.87152.76220.38130.625214.021740.05861.75395.22202.01291.42172.736662.382223.401101.13505.00258.12372.37220.716662.382223.401101.13505.00258.12372.37220.719898.283303.301635.95750.28383.49553.23327.9013999.764672.072313.831061.17542.39782.46463.7725A32A40A50A65A80A90A100A125A150A200A3442.748.660.576.389.1101.6114.3139.8165.2216.31.651.651.651.652.12.12.12.12.82.82.830.739.445.357.272.184.997.4110.1134.2159.6210.77.40E-041.22E-031.61E-032.57E-034.08E-035.66E-037.45E-039.52E-031.41E-022.00E-023.49E-020.230.140.110.070.040.030.020.020.010.010.000.660.400.300.190.120.090.070.050.030.020.011.150.700.530.330.210.150.110.090.060.040.022.751.671.270.790.500.360.270.210.140.100.065.393.272.481.550.980.700.540.420.280.200.118.935.424.102.571.621.170.890.690.470.330.1913.368.116.143.852.421.751.331.040.700.490.2810.4011.348.585.383.392.441.861.450.980.690.4024.9010.4011.437.174.513.262.471.941.300.920.5338.8023.5610.4011.187.045.073.863.022.031.440.8257.2034.7326.2710.4010.377.485.684.452.992.121.2179.1648.0636.3622.8010.4010.357.866.154.142.931.68104.6863.5648.0830.1518.9810.4010.408.145.483.872.22133.7681.2161.4338.5324.2517.4910.4010.407.004.952.84133.7681.2161.4338.5324.2517.4913.2910.407.004.952.84198.73120.6691.2757.2536.0325.9919.7415.4510.407.354.22281.08170.65129.0980.9750.9636.7527.9221.8514.7110.405.97154998.89299.9725LV (m/s)22087.677683.074420.391849.47945.32570.42381.24272.66204.63131.3089.0664.3648.6738.0938.0925.6418.1310.40116408.36984.5525LV (m/s)24399.678142.784032.691849.47945.321363.72808.29489.88297.42224.99141.1188.8264.0548.6738.0925.6418.1310.40