专利名称：Defect detection apparatus and defect
detection method
发明人：Yukihisa Honda申请号：US10490481申请日：20030806公开号：US07061840B2公开日：20060613
专利附图：
摘要：A subtraction results value arrived at by subtracting a required subtractionvalue from a detection maximum value is taken as a maximum value in cases where adetection maximum value obtained from an RF signal is in a reducing direction, and an
addition results value arrived at by adding a required value to a detection minimum valueis taken as a minimum value in cases where a detection minimum value obtained from anRF signal is in an increasing direction. An RF amplitude value indicating an amplitude levelof an RF signal is then obtained by subtracting the minimum value from the maximumvalue. Also, the subtraction value or the addition value is variably set according to thecenter value for the amplitude of the RF signal increasing or decreasing in excess of aprescribed level. As a result, accuracy of defect detection can be improved in cases wherethe amplitude level of the RF signal is biased on the maximum value side or the minimumvalue side.
申请人：Yukihisa Honda
地址：Kanagawa JP
国籍：JP
代理机构：Rader, Fishman & Grauer, PLLC
代理人：Ronald P. Kananen
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