专利名称：Critically aligned optical mems dies for large
packaged substrate arrays and method ofmanufacture
发明人：Vernon Shrauger申请号：US10195029申请日：20020709
公开号：US20030020094A1公开日：20030130
专利附图：
摘要：A novel array of optically and electrically interacting optical MEMS diesphysically and electrically integrally attached upon an optically transmissive preferably
(transparent) printed circuit substrate that is monolithically formed with one or moreoptical components, such as lenses, for providing fixed optical path alignment andinteraction therebetween, and with provision for the integration also of active opticalcomponents such as lasers and photodiodes and the like.
申请人：AXIOWAVE NETWORKS, INC.
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